Books and Journals
  IEEExplore (IEEE publications)
  Journal of Micromechanics and Microengineering
  Sensors and Actuators A: Physical Sensors --- ScienceDirect
  Sensors and Actuators B: Chemical Sensors --- ScienceDirect

Materials and Methods
  ASIMPS   (Application-Specific Integrated MEMS Process Service
  Conductive glass (Pelkington)
  Cronos (Multiproject MEMS fabrication)
  Goodfellow (metals, polymers, ceramics, other materials)
  Intelligent MEMS Design
  Intelligent Micro Patterning (maskless photolithography)
  Material Database - MEMS and Nanotechnology Clearinghouse
  MEMSCAP (MUMPs - Multi-User MEMS Processes)
  Microfabrica (EFAB - Application-Specific MicroDevice fabrication)
  MOSIS - IC Prototyping and Low Volume Production
  WebEE - Electrical Engineering Resource Pages

Organizations
  Institute of Electrical and Electronics Engineers (IEEE)
  Nano Science and Technology Institute

WWW
  MEMS and Nanotechnology Clearinghouse
  MEMS Center
  MEMS Exchange