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Index
MEMS (Microelectromechanical Systems) References

Books and Journals
  IEEExplore (IEEE publications)
  Journal of Micromechanics and Microengineering
  Sensors and Actuators A: Physical Sensors --- ScienceDirect
  Sensors and Actuators B: Chemical Sensors --- ScienceDirect

Materials and Methods
  ASIMPS   (Application-Specific Integrated MEMS Process Service
  Conductive glass (Pelkington)
  Cronos (Multiproject MEMS fabrication)
  Goodfellow (metals, polymers, ceramics, other materials)
  Intelligent MEMS Design
  Intelligent Micro Patterning (maskless photolithography)
  Material Database - MEMS and Nanotechnology Clearinghouse
  MEMSCAP (MUMPs - Multi-User MEMS Processes)
  Microfabrica (EFAB - Application-Specific MicroDevice fabrication)
  MOSIS - IC Prototyping and Low Volume Production
  WebEE - Electrical Engineering Resource Pages

Organizations
  Institute of Electrical and Electronics Engineers (IEEE)
  Nano Science and Technology Institute

WWW
  MEMS and Nanotechnology Clearinghouse
  MEMS Center
  MEMS Exchange


USC Pulsed Power Group
   Vernier@ISI
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Tom Vernier
Semiconductor and Electrobionic Engineer
Email: vernier@ieee.org
URL: http://www.electrobionics.org/
Phone: --------------

Last revised 2005 APR 23

Copyright © 2001--2005 by Tom Vernier.
All rights reserved.